Heat recovery in chip production: economical and sustainable

At a state-of-the-art chip production site in Schleswig-Holstein, four QUANTUM chillers with heat recovery (Green Heat Recovery) and a QUANTUM A1700-T5K00-10VC ensure the optimum temperature in production and in the clean rooms.
 

A US semiconductor manufacturer is preparing its chip production in Germany for the future with a targeted expansion of its site in Schleswig-Holstein. For its cooling and heating supply, the internationally active company relies on our innovative cooling and heating solutions, which will confidently meet future challenges. Five QUANTUM Air chillers therefore guarantee the optimum temperature in production and in the chip production clean rooms: four QUANTUM A1700 with heat recovery (Green Heat Recovery) and one QUANTUM A1700-T5K00-10VC. Together, the systems impress with their high performance in both the cooling and heating sectors. In total, the QUANTUM models with and without heat recovery have a cooling capacity of 9,600 kilowatts and a heating capacity of 9,800 kilowatts. Thanks to the DirtStop module, which reliably keeps air-side contamination away from the heat exchangers, and corrosion protection for the condensers, operational reliability and consistent efficiency can be relied upon. The experts from ENGIE Refrigeration themselves scored points with the chip production specialist during the planning phase, particularly thanks to their technical expertise in cooling, heating and heat recovery.

Chip production with a future
However, the US semiconductor manufacturer not only benefits from a high-performance, reliable cooling and heating supply and from ENGIE Refrigeration's technical expertise. The customer also benefits from the heat recovery technology from an ecological and economic point of view, as the use of waste heat means that investments in other heat generation systems for chip production are in some cases completely eliminated. In addition, heat recovery increases the overall efficiency of the chiller if it uses the waste heat from the cooling process. This form of energy recycling saves valuable resources and helps the company make significant progress in terms of climate neutrality in chip production. The environmentally friendly refrigerant R-1234ze, which is used in all five systems, also contributes to the sustainability targets. A continuation of the successful project is already planned: In the coming years, five more chillers from ENGIE Refrigeration will round off the cooling and heating concept.